ULVAC-RIKO
RHL-P Series Parabolloidal Reflection Type Infrared Gold Image Furnace

- Rapid heating and cooling with high accuracy -

The ULVAC-RIKO infrared gold image furnace has made a dramatic advance along with its associated equipment and has completely changed the image of the heating system. The parabolloidal reflection type infrared gold image furnace features rapid heating and cooling with high accuracy. The furnace is compatible with small-scale experimental units to large-scale systems by combining various types of image furnaces, including the standard tubular furnace.

Features

1. Wide uniform temperature zone and rapid heating and cooling
A large zone with high temperature uniformity can be obtained both in rapid heating and cooling because of the parabolloidal reflector with high accuracy and high reflectivity and the arrangement of heaters with high temperature uniformity.
2. The furnace can be used as a handy high temperature atmospheric furnace.
The object to be heated is protected with a transparent quartz tube, allowing heating in a high vacuum or high purity gas atmosphere free from contamination.
3. The furnace can be built as a high speed uniform heating furnace, high temperature gradient furnace or stepwise heating furnace. The reflection light being parallel, the parabolloidal reflector can provide any temperature profile by controlling individual reflectors. A heating furnace with a long uniform heating zone not available with the conventional furnace, special temperature gradient furnace and stepwise heating furnace can also be built.
4. Powerful in line heating
Heating time can be reduced drastically because of its high heater density as compared with the conventional furnace. Also it requires no preheating and can meet with operating conditions quickly, resulting in dramatic energy saving. Yet the furnace is compact and can be used effectively in a limited space.

Specifications * The maximum ultimate temperature varies with the characteristics of the infrared ray of the heated sample.
Model Ps35V Ps310V P65C P68C P610C P616C P810C P816C
Heating length 140 265 140 200 265 420 265 420
Total length 236 361 236 296 361 516 361 516
Maximum power of furnace 3.6 6.0 7.2 9.6 12.0 18.0 16.0 24.0
Applied voltage 144 200 144 200 200 300 200 300
Cooling water requirements 2.0 3.0 4.0 5.0 6.0 8.0 7.0 8.0
Lamp model 1.2-5-144 2-10-200 1.2-5-144 1.6-8-200 2-10-200 3-16-300 2-10-200 3-16-300
Application

・Annealing of compound wafer
・Heat treatment of sheet materials
・Heating of moving sample
・Heat source for CVD
・Temperature gradient furnace, stepwise heating furnace

・High speed heat cycle test of sheet
・Atmospheric heat treatment furnace
・Heating furnace for mechanical test
・High vacuum heat treatment furnace
・Heat source for CVD
・High purity gas treatment for electronic materials (sealing, curing, sintering, and others)
・Reactor heating furnace

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